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논문 기본 정보

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학술저널
저자정보
탁봉열 (디에이치엠) 김병덕 (한국기계연구원) 양해경 (TIE기술사사무소) 한기영 (디에이치엠) 이소아 (디에이치엠)
저널정보
한국유체기계학회 한국유체기계학회 논문집 유체기계저널 제14권 제3호
발행연도
2011.6
수록면
23 - 27 (5page)

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Due to a roots type medium vacuum pump is operated in condition of 1∼10?³ torr vacuum, it could be applied for production and process of industrial parts, such as precise processing, vaporization, enrichment, separation, casting, metaling, welding, transportation. Therefore, the demand of this pump is increasing nowadays in our industrial markets of semiconductor, electric, electronic, automobile, material, environmental and transporting industries. However, the pumps are almost imported, because the domestic pumps are inferior in fields of vacuum range as under 10?¹torr, relevant techniques(design, fabrication, casting, test, etc.) to the imported ones.
In this study, essential parts of the development pump are designed with using of CFD and 3D decodes, FEM for analysing strength and deformation, generated heat, vibration and noise control, and are casted with using of mechanochemistry techniques for decreasing of weights, increasing of heat resistances and abrasion durability of materials for pump caing and impellers especially. Besides, in order to achieve ultimate vacuum around 10?³torr, this pump is compesed of 6 stages, among which 1st stage is operated separately from remained stages. Additionally, a test rig for prototype pumps(300㎥/h and 2,500㎥/h) is designed and procured as to apply for multi-staged rootz type vacuum pump, with modification of the test method recommended by KS B 6314 “Positive-displacement oil-sealed rotary vacuum pumps”.

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UCI(KEPA) : I410-ECN-0101-2013-554-000627269