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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2014.9
- 수록면
- 45 - 51 (7page)
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초록· 키워드
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This work carried out for the effective synthesis characteristics of graphene nanowall film by controlling the electric field in a RF plasma CVD process. For that, the bipolar bias voltage was applied to the substrate such as Si and glass materials for the best chemical reaction of positive and negative charges existing in the plasma. For supplying the seed formation sites on substrate and removing the oxidation layer on the substrate surface, the electron bombardment into substrates was performed by a positive few voltage in hydrogen plasma. After that, hydrocarbon film, which is not a graphene nanowall, was deposited on substrates under a negative bias voltage with hydrogen and methane gases. At this step, the film on substrates could not easily identify due to its transparent characteristics. However, the transparent film was easily changed into graphene nanowall by the final hydrogen plasma treatment process. The resultant raman spectra shows the existence of significant large 2D peaks corresponding to the graphene.
목차
Abstract
1. 서론
2. 실험방법
3. 실험결과 및 고찰
4. 결론
References
참고문헌 (10)
참고문헌 신청
1. [학술지(정기간행물)] - N. M. R. Peres. / 2010 / Colloquium:The transport properties of graphene: An introduction / Reviews of Modern Physics 82 (3) : 2673 ~ 2700
2. [학술지(정기간행물)] - Tingting Feng. / 2012 / Multi-layer graphene treated by O2 plasma for transparent conductive electrode applications / Materials letter 73 : 187 ~ 189
3. [학술지(정기간행물)] - Tomo-o Terasawa. / 2012 / Growth of graphene on Cu by plasma enhanced chemical vapor deposition / Carbonm 50 : 869 ~ 874
4. [학술지(정기간행물)] - Takatoshi Yamada. / 2012 / A roll-to-roll microwave plasma chemical vapor deposition process for the production of 294mm width graphene films at low temperature / Carbon 50 : 2615 ~ 2619
5. [학술지(정기간행물)] - J Kim. / 2010 / Large-area surface wave plasmas using microwave multi-slot antennas for nanocrystalline diamond film deposition / Plasma Sources Sci. Technol 19 : 015003 ~
2. [학술지(정기간행물)] - Tingting Feng. / 2012 / Multi-layer graphene treated by O2 plasma for transparent conductive electrode applications / Materials letter 73 : 187 ~ 189
3. [학술지(정기간행물)] - Tomo-o Terasawa. / 2012 / Growth of graphene on Cu by plasma enhanced chemical vapor deposition / Carbonm 50 : 869 ~ 874
4. [학술지(정기간행물)] - Takatoshi Yamada. / 2012 / A roll-to-roll microwave plasma chemical vapor deposition process for the production of 294mm width graphene films at low temperature / Carbon 50 : 2615 ~ 2619
5. [학술지(정기간행물)] - J Kim. / 2010 / Large-area surface wave plasmas using microwave multi-slot antennas for nanocrystalline diamond film deposition / Plasma Sources Sci. Technol 19 : 015003 ~
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