Quantitative analysis of silicone fluid by inductively coupled plasma-optical emission spectroscopy

Mi ,  i ,  Kwon

한국분석과학회 학술대회

2016 .11

Dry etching of Al₂O₃ thin films in inductively coupled plasma system

Seok SON ,  Young Hee JOO ,  Chang Il KIM

한국진공학회 학술발표회초록집

2016 .08

Analysis of chemical reactions of CF₄ and C₄F₈ for inductively coupled plasma based on plasma parameters

J. J. Lee ,  S. J. Kim ,  Y. S. Lee 외 2명

한국진공학회 학술발표회초록집

2019 .08

Study on the electrical and optical diagnosis of electron temperatures according to conditions of plasma emission light intensity in inductively coupled plasma

Ye-Seul LEE ,  Jin-Woo CHOI ,  Tae-Hoon JO 외 3명

한국진공학회 학술발표회초록집

2016 .08

Rare Earth Elements analysis in monazite using Na₂O₂ sintering and by ICP-MS and ICP-OES

최원명 ,  박일용 ,  음철헌

한국분석과학회 학술대회

2015 .11

Elemental analysis of rice using laser ablation inductively coupled plasma mass spectrometry(LA-ICP-MS)

Seyeon kim ,  Sung-Youn Kim ,  Dong-jin Kang 외 4명

한국분석과학회 학술대회

2022 .11

Sensitivity Enhancement of Fault Detection in Plasma Etching Processes using Optical Emission Spectroscopy with Multivariate Analysis

Hakseung Lee ,  Haegyu Jang ,  Honyoung Lee 외 1명

한국진공학회 학술발표회초록집

2015 .02

Multi-element analysis in sediments by NH₄HF₂-HNO₃-HCl-H₂O₂ digestion and ICP-OES

최원명 ,  이덕환 ,  유윤정 외 2명

한국분석과학회 학술대회

2015 .11

Comparative analysis of trace elements in clay minerals by ICP-OES, ICP/MS

Lee Hyun –A ,  Kim Hyun-Goo ,  Jung Min-Ki 외 1명

한국분석과학회 학술대회

2017 .11

Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas

홍영훈 ,  김주호 ,  이무현 외 2명

한국진공학회 학술발표회초록집

2020 .08

Interpretation of current decrease during E - H mode transition in a cylindrical inductively coupled plasma

Jun-Hyeon Moon ,  Ho-Jun Moon ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2018 .08

Diagnostics and modeling of inductively coupled methane plasma using the electrostatic probe and plasma simulations

차주홍 ,  이호준

한국진공학회 학술발표회초록집

2017 .02

Research on parallelization mechanism of inductively coupled plasma for large area plasma source

이장재 ,  김시준 ,  김광기 외 5명

한국진공학회 학술발표회초록집

2016 .02

A Review of Inductively Coupled Plasma-Assisted Magnetron Sputter System

Tae Hyung Kim ,  Geun Young Yeom

Applied Science and Convergence Technology

2019 .09

Plasma Diagnostics using Optical Emission Spectroscopy on Argon Capacitively Coupled Plasma with Various Line-of-Sight

Jaemin Song ,  Jongsik Kim ,  Dae Chul Kim 외 6명

한국진공학회 학술발표회초록집

2019 .08

Effects of pulse modulation in Ar/H₂ inductively coupled plasma using fluid simulation

서권상 ,  김동현 ,  이호준

한국진공학회 학술발표회초록집

2017 .08

Brief Review of Atomic Layer Etching Based on Radiofrequency-Biased Ar/C₄F₆-Mixture-Based Inductively Coupled Plasma Characteristics

Min Young Yoon ,  Hee Jung Yeom ,  Jong-Ryul Jeong 외 2명

Applied Science and Convergence Technology

2023 .03

Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System

Ju-Ho Kim ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2020 .08

Correlation Analysis of Plasma Optical Emission Spectra and Silicon Nitride Films Deposited in Inductively Coupled Plasmas

Seunghun Han ,  Byung hyun Oh ,  Yong soo Lim 외 1명

한국진공학회 학술발표회초록집

2021 .02

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08