Improving sensitivity of SAW-based pressure sensor with metal ground shielding over cavity

이기근; 황정수; Wen Wang; 김근영; 양상식

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자료유형: 학술저널

저자정보: 이기근 황정수 Wen Wang 김근영 양상식

저널정보: 한국마이크로전자및패키징학회 마이크로전자 및 패키징학회지 마이크로전자 및 패키징학회지 제12권 제3호

발행연도: 2005.1

수록면: 267 - 274 (8page)

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This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A 41o YX LiNbO3 piezoelectric substrate was used because of its high SAW propagation velocity and large values of electromechanical coupling factors K2. A silicon substrate with ~200m deep cavity was bonded to the diaphragm with epoxy, in which gold was covered all over the inner cavity in order to confine electromagnetic energy inside the sensor, and provide good isolation of the device from its environment. The reflection coefficient S11 was measured using network analyzer. High S/N ratio, sharp reflected peaks, and clear separation between the peaks were observed. As a mechanical compression force was applied to the diaphragm from top with extremely sharp object, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of applied mechanical compression force. The measured S11 results showed a good agreement with simulated results obtained from equivalent admittance circuit modeling.

#Batteryless sensors #Diaphragm #Piezoelectric #Pressure sensor #Surface acoustic wave #SAW)

참고문헌 (11)

참고문헌 신청

/ 1996 / Design fabrication and application of precise delay lines at 2.45GHz 261

/ 1996 / Quartz pressure sensor based on SAW reflective delay line 347

/ 1998 / A wireless AQP pressure sensor using chirped SAW delay lines structure 355

/ 1998 / Surface Acoustic Wave Devices for Mobile and Wireless Communications

/ 1998 / Wireless passive SAW sensor systems for industrial and domestic applications

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