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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
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Currently, focused ion beams (FIB) are widely used for specimen preparation in atom probe tomography (APT), which is a three-dimensional and atomic-scale compositional analysis tool. Specimen preparation, in which a specif c region of interest is identif ed and a sharp needle shape created, is the first step towards successful APT analysis. The FIB technique is a powerful tool for site-specif c specimen preparation because it provides a lift-out technique and a controllable manipulation function. In this paper, we demonstrate a general procedure containing the crucial points of FIB-based specimen preparation. We introduce aluminum holders with moveable pin and an axial rotation manipulator for specimen handling, which are useful for f ipping and rotating the specimen to present the backside and the perpendicular direction. We also describe specimen preparation methods for nanowires and nanopowders, using a pick-up method and an embedding method by epoxy resin, respectively.
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참고문헌 (15)
참고문헌 신청
Allen J E / 2008 / Highresolution detection of Au catalyst atoms in Si nanowires / Nat. Nanotechnology 3:168~173
Blumtritt H / 2014 / Preparation of nanowire specimens for laser-assisted atom probe tomography / Nanotechnology 25:435704-1-7
Bunton J H / 2007 / Advances in pulsedlaser atom probe: instrument and specimen design for optimum performance / Mirosc. Microanal 13:418~427
Eichfeld C M / 2012 / Local electrode atom probe analysis of silicon nanowires grown with an aluminum catalyst / Nanotechnology 23:215205-1-6
Felfer P / 2015 / New approaches to nanoparticle sample fabrication for atom probe tomography / Ultramicroscopy 159:413~419
Blumtritt H / 2014 / Preparation of nanowire specimens for laser-assisted atom probe tomography / Nanotechnology 25:435704-1-7
Bunton J H / 2007 / Advances in pulsedlaser atom probe: instrument and specimen design for optimum performance / Mirosc. Microanal 13:418~427
Eichfeld C M / 2012 / Local electrode atom probe analysis of silicon nanowires grown with an aluminum catalyst / Nanotechnology 23:215205-1-6
Felfer P / 2015 / New approaches to nanoparticle sample fabrication for atom probe tomography / Ultramicroscopy 159:413~419
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