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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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초록· 키워드
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In-situ transmission electron microscopy (TEM) holders that employ a chip-type specimen stage have been widely utilized in recent years. The specimen on the microelectromechanical system (MEMS)-based chip is commonly prepared by focused ion beam (FIB) milling and ex-situ lift-out (EXLO). However, the FIB-milled thin-foil specimens are inevitably contaminated with Ga + ions. When these specimens are heated for real time observation, the Ga+ions influence the reaction or aggregate in the protection layer. An effective method of removing the Ga residue by Ar+ ion milling within FIB system was explored in this study. However, the Ga residue remained in the thin-foil specimen that was extracted by EXLO from the trench after the conduct of Ar+ ion milling. To address this drawback, the thin-foil specimen was attached to an FIB lift-out grid, subjected to Ar + ion milling, and subsequently transferred to an MEMS-based chip by EXLO. The removal of the Ga residue was confirmed by energy dispersive spectroscopy.
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참고문헌 (11)
참고문헌 신청
M.J. Campin / 2018 / NarrowBeam Argon Ion Milling of Ex Situ Lift-out FIB Specimens Mounted on Various Carbon-Supported Grids / Paper presented at the 44th International Symposium for Testing and Failure Analysis
M. Duchamp / 2014 / Convenient preparation of high-quality specimens for annealing experiments in the transmission electron microscope / Microsc. Microanal 20:1638~1645
L. A. Giannuzzi / 1997 / Focused ion beam milling and micromanipulation lift out for site specific cross-section TEM specimen preparation / MRS Proc 480:19
L. A. Giannuzzi / 2015 / Theory and new applications of ex situ lift out / Microsc. Microanal 21:1034~1048
L.R. Heringer / 1996 / TEM Sample Preparation Using a Focused Ion Beam and a Probe Manipulator / Paper presented at the 22nd International Symposium for Testing and Failure Analysis
M. Duchamp / 2014 / Convenient preparation of high-quality specimens for annealing experiments in the transmission electron microscope / Microsc. Microanal 20:1638~1645
L. A. Giannuzzi / 1997 / Focused ion beam milling and micromanipulation lift out for site specific cross-section TEM specimen preparation / MRS Proc 480:19
L. A. Giannuzzi / 2015 / Theory and new applications of ex situ lift out / Microsc. Microanal 21:1034~1048
L.R. Heringer / 1996 / TEM Sample Preparation Using a Focused Ion Beam and a Probe Manipulator / Paper presented at the 22nd International Symposium for Testing and Failure Analysis
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