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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
Focused ion beam method, which has excellent capabilities such as local deposition and selective etching, is widely used for micro-electromechanical system (MEMS)-based in situ transmission electron microscopy (TEM) sample fabrication. Among the MEMS chips in which one can apply various external stimuli, the electrical MEMS chips require connection between the TEM sample and the electrodes in MEMS chip, and a connected deposition material with low electrical resistance is required to apply the electrical signal. Therefore, in this study, we introduce an optimized condition by comparing the electrical resistance for C-, Pt-, and W- ion beam induced deposition (IBID) at 30 kV and electron beam induced deposition (EBID) at 1 and 5 kV. The W-IBID at 30 kV with the lowest electrical resistance of about 30 Ω shows better electrical properties than C- and Pt-IBID electrodes. The W-EBID at 1 kV has lower electrical resistance than that at 5 kV; thus, confirming its potential as an electrode. Therefore, for the materials that are susceptible to ion beam damage, it is recommended to fabricate electrical connections using W-EBID at 1 kV.
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참고문헌 (7)
참고문헌 신청
안병선 / 2018 / Transmission Electron Microscopy Specimen Preparation for Two Dimensional Material Using Electron Beam Induced Deposition of a Protective Layer in the Focused Ion Beam Method / 한국현미경학회지 48(4):122~125
L.A. Giannuzzi / 1999 / A review of focused ion beam milling techniques for TEM specimen preparation / Micron 30:197
M. Hammad Fawey / 2016 / In-Situ TEM Studies of Micron-sized All-solid-state Fluoride Ion Batteries: Preparation, Prospects, and Challenges / Microsc. Res. Tech. 79:615
N.I. Kato / 2004 / Reducing focused ion beam damage to transmission electron microscopy samples / J. Electron Microsc. 53:451
L. Mele / 2016 / A MEMS-Based Heating Holder for the Direct Imaging of Simultaneous In-Situ Heating and Biasing Experiments in Scanning/Transmission Electron Microscopes / Microsc. Res. Tech. 79:239
L.A. Giannuzzi / 1999 / A review of focused ion beam milling techniques for TEM specimen preparation / Micron 30:197
M. Hammad Fawey / 2016 / In-Situ TEM Studies of Micron-sized All-solid-state Fluoride Ion Batteries: Preparation, Prospects, and Challenges / Microsc. Res. Tech. 79:615
N.I. Kato / 2004 / Reducing focused ion beam damage to transmission electron microscopy samples / J. Electron Microsc. 53:451
L. Mele / 2016 / A MEMS-Based Heating Holder for the Direct Imaging of Simultaneous In-Situ Heating and Biasing Experiments in Scanning/Transmission Electron Microscopes / Microsc. Res. Tech. 79:239
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