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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국인터넷방송통신학회 International journal of internet, broadcasting and communication : IJIBC International journal of internet, broadcasting and communication : IJIBC 제9권 제2호
- 발행연도
- 2017.1
- 수록면
- 20 - 26 (7page)
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초록· 키워드
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Process control is crucial in many industries, especially in semiconductor manufacturing. In such large-volume multistage manufacturing systems, a product has to go through a very large number of processing steps with reentrant) before being completed. This manufacturing system has many machines of different types for processing a high mix of products. Each process step has specific quality standards and most of them have nonlinear dynamics due to physical and/or chemical reactions. Moreover, many of the processing steps suffer from drift or disturbance. To assure high stability and yield, on-line quality monitoring of the wafers is required. In this paper we develop a real-time fault detection system on semiconductor manufacturing process. Proposed system is superior to other incremental fault detection system and shows similar performance compared to batch way.
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참고문헌 (10)
참고문헌 신청
L. H. Chiang / 2000 / Fault diagnosis in chemical processes using fisher discriminant analysis, discriminant partial least squares, and principal component analysis / Chemometrics and intelligent laboratory systems 50(2):243~252
L. H. Chiang / 2004 / Fault diagnosis based on fisher discriminant analysis and support vector machines / Computers & chemical engineering 28(8):1389~1401
Samanta, B. / 2004 / Gear fault detection using artificial neural networks and support vector machines with genetic algorithms / Mechanical Systems and Signal Processing 18(3):625~644
L. Wang / 2005 / In Advances in Natural Computation / Springer :832~840
Q. P. He / 2007 / Fault detection using the k-nearest neighbor rule for semiconductor manufacturing processes / Semiconductor manufacturing, IEEE transactions on 20(4):345~354
L. H. Chiang / 2004 / Fault diagnosis based on fisher discriminant analysis and support vector machines / Computers & chemical engineering 28(8):1389~1401
Samanta, B. / 2004 / Gear fault detection using artificial neural networks and support vector machines with genetic algorithms / Mechanical Systems and Signal Processing 18(3):625~644
L. Wang / 2005 / In Advances in Natural Computation / Springer :832~840
Q. P. He / 2007 / Fault detection using the k-nearest neighbor rule for semiconductor manufacturing processes / Semiconductor manufacturing, IEEE transactions on 20(4):345~354
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