Silicon oxide etching studies in inductively coupled fluorocarbon plasmas

Won-Seok Chang ,  Deuk-Chul Kwon ,  Mi-Young Song 외 7명

한국진공학회 학술발표회초록집

2017 .02

Brief Review of Electron Collision Studies of Molecules Relevant to Plasma

Dhanoj Gupta

Applied Science and Convergence Technology

2020 .11

C6F6를 이용한 Plasma 공정 중 회수 전후의 가스 및 Plasma 특성 연구

오지영 ,  이지환 ,  정준호 외 5명

한국진공학회 학술발표회초록집

2020 .08

Characterization of SiO₂ Over Poly-Si Mask Etching in Ar/C₄F₈ Capacitively Coupled Plasma

In Ho Seong ,  Jang Jae Lee ,  Chul Hee Cho 외 3명

Applied Science and Convergence Technology

2021 .11

Effect of atmospheric pressure chemical ionization or electrospray ionization on fragmentation of limonene

김혜성 ,  김정권

한국분석과학회 학술대회

2023 .05

Ionization of C60 molecule on graphene

Jonghyun PAK ,  Hyung-Joon SHIN ,  Minbok JUNG 외 1명

한국진공학회 학술발표회초록집

2016 .08

Effect of Ultrasonic Microdroplet Generation in the Low-Temperature Plasma Ionization-Mass Spectrometry

Hyoung Jun Lee ,  Yong-Hyeon Yim

Mass Spectrometry Letters

2019 .12

Peltier Heating-Assisted Low Temperature Plasma Ionization for Ambient Mass Spectrometry

Hyoung Jun Lee ,  Ji-seon Oh ,  Sung Woo Heo 외 8명

Mass Spectrometry Letters

2015 .09

Electron impact scattering cross sections of C₂F₂ for plasma application

Dhanoj GUPTA ,  Heechol CHOI ,  Mi-Young SONG

한국진공학회 학술발표회초록집

2016 .08

Characteristics of SiO₂ Etching by Capacitively Coupled Plasma with Different Fluorocarbon Liquids (C₇F₁₄, C₇F₈) and Fluorocarbon Gas (C₄F₈)

Seung-Wan Yoo ,  Chulhee Cho ,  Kyungtae Kim 외 2명

Applied Science and Convergence Technology

2021 .07

Fast Screening of Harmful Disinfectants in Household Products via Low-Temperature Plasma Ionization-Mass Spectrometry

Hyoung Jun Lee ,  Gi Ryang Kweon ,  Yong-hyeon Yim

Mass Spectrometry Letters

2017 .06

Ambient ionization mass spectrometry imaging

Jae Young KIM ,  Eunseok SEO ,  Hyunmin KIM 외 2명

한국진공학회 학술발표회초록집

2016 .08

A study on the transient current and the impact ionization under the high voltage pulse in the oxide semiconductor TFTs

Hyeon-Jun Lee ,  Katsumi Abe ,  Won Seok Yun

한국진공학회 학술발표회초록집

2020 .08

A Study on Adsorption and Recovery of Liquid Fluorocarbon Precursors Using Vaporization

Junyoung Pa ,  k ,  Jiyoung Oh 외 5명

한국진공학회 학술발표회초록집

2020 .02

Hydrophobic and wear-resistible surface coating on a carbon steel using linear microwave plasma source

차주홍 ,  한문기 ,  손의정 외 4명

한국진공학회 학술발표회초록집

2015 .02

Plasma Properties Data Center Activities for Plasma Application in the National Fusion Research Institute

송미영 ,  김대철 ,  권득철 외 16명

한국진공학회 학술발표회초록집

2019 .08

Effect of multi-step ionizations on the tail electron temperature in an argon inductively coupled plasma

Geun-Hong Pa ,  k ,  Kyung-Hyun-Kim 외 1명

한국진공학회 학술발표회초록집

2018 .08

Ionization of Hydrogen in the Solar Atmosphere

채종철

Journal of Astronomy and Space Sciences

2021 .01

Direct Sampling Mass Spectrometry by Ambient Desorption/Ionization Methods

차상원

한국분석과학회 학술대회

2023 .11

A New Version of the Plasma Database for Plasma Physics in the Data Center for Plasma Properties

Jun-Hyoung Pa ,  k ,  Heechol Choi 외 5명

Applied Science and Convergence Technology

2020 .01