가속 전압 및 Beam Current 조절에 따른 Si wafer & GaAs wafer patterning 분석

박나현 ,  손미영 ,  채정은

한국분석과학회 학술대회

2023 .11

Vertically sputtered WS₂ embedding type I heterostructure for improving ultraviolet-visible photodetector based ZnO

Thanh Tai Nguyen ,  Malkeshkuma ,  Patel 외 2명

한국진공학회 학술발표회초록집

2018 .08

Low-Temperature Synthesis of Wafer Scale WS₂ by PECVD

Kanade Vinit ,  김형우 ,  박근상 외 1명

한국진공학회 학술발표회초록집

2019 .02

Vanadium oxide-embedded Si for NIR Photodetector

Tai Nguyen Thanh ,  이경남 ,  Malkeshkuma 외 3명

한국진공학회 학술발표회초록집

2018 .02

Pyro-Phototronic effect governed an efficient, Self-Powered, Broadband, Photodetector Based on Vertically Grown SnS layers

Mohit Kuma ,  Malkeshkuma ,  Patel 외 2명

한국진공학회 학술발표회초록집

2018 .02

Development of low surface roughness, low residual stress, and high electrical conductivity a-InZnO for next generation optoelectronic devices

Naveen Kuma ,  김준동

한국진공학회 학술발표회초록집

2021 .02

Development of process for wafer reclaim without CMP

Youngyeon JI ,  Bae JINYOUNG ,  Sungnam YOO

한국진공학회 학술발표회초록집

2016 .08

Wafer scale well-connected CVD-grown graphene grains by using selective atomic layer deposition of ZnO

Nguyen Van Long ,  Sung Myung Mo

한국진공학회 학술발표회초록집

2017 .02

Preparation of VO₂ thin film with high near IR modulation and high visible transmission by RF sputtering

Jung-Hoon YU ,  Sang-Hun NAM ,  Hyeon Jin SEO 외 5명

한국진공학회 학술발표회초록집

2016 .08

Growth and characterization of vertically p-n junctioned GaAs nanowires on Si for optoelectronic application

Jeong Woo HWANG ,  Jeong-Woo CHOE ,  Doo Gun KIM 외 1명

한국진공학회 학술발표회초록집

2016 .08

Analysis of incident ion angle at 300mm wafer edge according to different focus ring feature

Jung-Hwan UM ,  Mi Na JANG

한국진공학회 학술발표회초록집

2016 .08

Optical and Electrical Performance of a Mid-Wavelength Infrared Interband Cascade Photodetector

Hun Lee ,  Minkyeong Kim ,  Jengin Song 외 3명

Applied Science and Convergence Technology

2024 .11

Surface treatment of silicon wafer using atmospheric plasmas by AC and unipolar pulsed power

김영운 ,  박주영 ,  최준

한국진공학회 학술발표회초록집

2020 .02

Effect of surface cleaning for laser texturing of mc-silicon wafer

Seung Hyun HA ,  Hee Soo KIM ,  Gi Ryoung MAENG 외 1명

한국진공학회 학술발표회초록집

2016 .08

Surface properties of Nb oxide thin films prepared by rf sputtering

박주연 ,  강용철

한국진공학회 학술발표회초록집

2016 .02

Proximity Vapor Transfer for Wafer-Scale SnS Semiconductors for Transparent Photovoltaics

PATEL MALKESHKUMAR PRAVINBHAI ,  김준동

한국진공학회 학술발표회초록집

2021 .02

Investigation of copper-zinc thin film obtained by RF co-sputtering method

최아롬 ,  박주연 ,  강유진 외 3명

한국진공학회 학술발표회초록집

2017 .02

Wafer Scale Formation of Nanodisk-Shaped SnS Layers for Photoelectrocatalytic Hydrogen Production

Malkeshkuma ,  Patel ,  Xiaomei Yu 외 2명

한국진공학회 학술발표회초록집

2017 .08

Experimental Investigation of Output Current Variation in Biased Silicon-based Quadrant Photodetector

Hongxu Liu ,  Di Wang ,  Chenang Li 외 1명

Current Optics and Photonics

2020 .08

Surface structure modification of vertically-aligned carbon nanotubes and their characterization of field emission property

Hawsawi adil ,  정구환

한국진공학회 학술발표회초록집

2016 .02