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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제17권 제1호
- 발행연도
- 2016.1
- 수록면
- 7 - 12 (6page)
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초록· 키워드
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This paper proposes a metal contact RF MEMS switch which utilizes a see-saw mechanism to acquire a switching action. The switch was built on a quartz substrate and involves vertical deflection of the beam under an applied actuation voltage of 5.46 volts over a signal line. The see-saw mechanism relieves much of the operation voltage required to actuate the switch. The switch has a stiff beam eliminating any stray mechanical forces. The switch has an excellent isolation of -90.9 dB (compared to - 58 dB in conventional designs [3]), the insertion of -0.2 dB, and a wide bandwidth of 88 GHz (compared to 40 GHz in conventional design [16]) making the switch suitable for wide band applications.
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등록된 정보가 없습니다.
참고문헌 (16)
참고문헌 신청
V. K. Vardan / 2003 / RF MEMS and Their Applications / John Wiley & Sons Ltd
G. M. Rebeiz / 2003 / RF MEMS Theory, Design and Technology / JohnWiley & Sons
Navjot K. Khaira / 2013 / A Novel Stiff Membrane Seesaw Type RF Microelectromechanical System DC Contact Switch on Quartz Substrate / Transactions on Electrical and Electronic Materials 14(3):116~120
H. Jaafar / 2014 / A comprehensive study on RF MEMS switch / Microsystem Technologies 20(12):2109~2121
C. Bozler / 2000 / IEEE MTT-S Int 1:153
G. M. Rebeiz / 2003 / RF MEMS Theory, Design and Technology / JohnWiley & Sons
Navjot K. Khaira / 2013 / A Novel Stiff Membrane Seesaw Type RF Microelectromechanical System DC Contact Switch on Quartz Substrate / Transactions on Electrical and Electronic Materials 14(3):116~120
H. Jaafar / 2014 / A comprehensive study on RF MEMS switch / Microsystem Technologies 20(12):2109~2121
C. Bozler / 2000 / IEEE MTT-S Int 1:153
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