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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제20권 제6호
- 발행연도
- 2019.1
- 수록면
- 542 - 547 (6page)
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초록· 키워드
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Chemoresistive hydrogen gas sensor with zinc oxide (ZnO) thin fi lm as a sensing layer has been studied with a coplanar integrated architecture of microheater and interdigitated electrode (IDE). ZnO thin films are fabricated via a chemical route. The present study is based on the use of a coplanar microheater with IDE’s fabricated for the hydrogen sensor. Further, the effect of the integrated architecture over sensing properties of the sensor has been studied. The sensing response of the sensor with fi lm thickness of 150 nm at an operating temperature of 160 °C comes out to be 10.97. The prime aim of the study is to present coplanar integrated architecture of microheater and IDE’sfor a ZnO based hydrogen sensor.
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참고문헌 (23)
참고문헌 신청
K. -N. Lee / 2009 / A high-temperature MEMS heater using suspended silicon structures / J. Micromech. Microeng 19:115011
P. Bhattacharyya / 2008 / A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane / Microelectron. Reliab 48:1772~1779
J. -K. Choi / 2010 / Design of selective gas sensors using electrospun Pd-doped SnO 2 hollow nanofi bers / Sens. Actuators B Chem 150:191~199
M. A. Andio / 2012 / Comparison of gas sensor performance of SnO2 nano-structures on microhotplate platforms / Sens. Actuators B Chem 165:13~18
K. -Y. Choi / 2010 / Low power micro-gas sensors using mixed SnO2 nanoparticles and MWCNTs to detect NO2, NH3, and xylene gases for ubiquitous sensor network applications / Sens. Actuators B Chem 150:65~72
P. Bhattacharyya / 2008 / A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane / Microelectron. Reliab 48:1772~1779
J. -K. Choi / 2010 / Design of selective gas sensors using electrospun Pd-doped SnO 2 hollow nanofi bers / Sens. Actuators B Chem 150:191~199
M. A. Andio / 2012 / Comparison of gas sensor performance of SnO2 nano-structures on microhotplate platforms / Sens. Actuators B Chem 165:13~18
K. -Y. Choi / 2010 / Low power micro-gas sensors using mixed SnO2 nanoparticles and MWCNTs to detect NO2, NH3, and xylene gases for ubiquitous sensor network applications / Sens. Actuators B Chem 150:65~72
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