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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.22 No.3
- 발행연도
- 2022.6
- 수록면
- 168 - 176 (9page)
- DOI
- 10.5573/JSTS.2022.22.3.168
이용수
초록· 키워드
오류제보하기
A high resolution, low power CMOS oscillator and frequency-to-digital converter for a fine dust sensor using a MEMS resonator is proposed. The proposed frequency-to-digital converter is realized based on dual-loop hybrid delay-locked loop to distinguish fine frequency variations according to very small fine dust concentrations, and simultaneously applied binary and square search algorithms to obtain accurate digital codes indicating frequency changes. An oscillator and frequency-to-digital converter for a fine dust sensor is implemented using the 0.18-μm CMOS process. The core size of the fabricated MEMS oscillator and frequency-to-digital converter is 0.9 mm² and consumes about 16 mW of power at 1.8 V supply voltage. The proposed frequency-to-digital converter covers the input frequency range of 1.7 GHz to 2.3 GHz with 1 bit resolution of about 3 MHz.
목차
Abstract
I. INTRODUCTION
II. PROPOSED FREQUENCY-TO-DIGITAL ARCHITECTURE
III. DETAIL CIRCUIT DESIGN
IV. SIMULATION AND EXPERIMENTAL RESULTS
V. CONCLUSIONS
REFERENCES
참고문헌 (11)
참고문헌 신청
Z. Wang, L. Calderón, A. P. Patton, M. S. Allacci, J. Senick, R. Wener, C. J. Andrews, and G. Mainelis, “Comparison of real-time instruments and gravimetric method when measuring particulate matter in a residential building,” Journal of the Air & Waste Management Association, vol. 66, no. 11, pp. 1109-1120, Nov. 2016.
C-H. Huang and C-Y. Tai, “Relative humidity effect on PM 2.5 readings recorded by collocated beta attenuation monitors,” Environmental Engineering Science, vol. 25, no. 7, pp. 1079-1090, Sep. 2008.
J. R. Patts, D. P. Tuchman, E. N. Rubinstein, E. G. Cauda, and A. B. Cecala, “Performance Comparison of Real-Time Light Scattering Dust Monitors Across Dust Types and Humidity Levels. Mining,” metallurgy & exploration, vol. 36, no. 4, pp. 741-749, Aug. 2019.
S. B. Paril, V. Chu, and J.P. Conde, “Mass Sensing using an Amorphous Silicon MEMS resonator,” Procedia Chemistry, vol. 1, no. 1, pp. 1063-1066, Apr. 2009.
J-S. Choi, and W-T. Park, “MEMS particle sensor based on resonant frequency shifting” Micro and Nano Syst Lett, vol. 8, no. 17, Oct. 2020.
C-H. Huang and C-Y. Tai, “Relative humidity effect on PM 2.5 readings recorded by collocated beta attenuation monitors,” Environmental Engineering Science, vol. 25, no. 7, pp. 1079-1090, Sep. 2008.
J. R. Patts, D. P. Tuchman, E. N. Rubinstein, E. G. Cauda, and A. B. Cecala, “Performance Comparison of Real-Time Light Scattering Dust Monitors Across Dust Types and Humidity Levels. Mining,” metallurgy & exploration, vol. 36, no. 4, pp. 741-749, Aug. 2019.
S. B. Paril, V. Chu, and J.P. Conde, “Mass Sensing using an Amorphous Silicon MEMS resonator,” Procedia Chemistry, vol. 1, no. 1, pp. 1063-1066, Apr. 2009.
J-S. Choi, and W-T. Park, “MEMS particle sensor based on resonant frequency shifting” Micro and Nano Syst Lett, vol. 8, no. 17, Oct. 2020.
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