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학술저널
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한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제20권 제4호
발행연도
2019.1
수록면
350 - 358 (9page)

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In this paper, the cantilever based novel RF MEMS switch structure was designed and its dimensions were optimized through parametric analysis to reduce the pull in voltage and to increase the performance of the RF MEMS series switch at Ka-Band frequency. The selection of appropriate materials for the device is also done through the electromechanical parametric analysis. To improve the performance of the RF MEMS switch, the dimensions are optimized, and loss are reduced. To extract the optimized dimensions the switch has undergone electromechanical analysis such as pull in voltage, capacitance, switching time, stress analysis and RF performance. The reduction of pull-in voltage of the device such that it is capable of working in satellite and mobile communication applications is performed and analysed. Various Finite element model tools such as Comsol 5.2 is used for the analysis of the designed structure for analysing the electromechanical, capacitive, RFperformance and other parameters of the device. Ansys HFSS simulator tool is used for analysing the losses of the device and determining the frequency range at which the device have better performance.

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