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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2021.1
- 수록면
- 172 - 180 (9page)
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Effects of sputtering power on the deposition rate and microstructure, crystallinity, and electrical properties of Ag films duringdirect current (DC) magnetron sputtering are investigated. Thin films (~ 100 nm) are deposited at sputtering powers of 10, 20, 50,100, 200 and 300 W and analyzed by field-emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), transmissionelectron microscopy (TEM) and a four-point probe. The film deposited at a sputtering power of 10 W has the lowest growthrate, but the highest crystalline quality, with the lowest full width at half maximum (FWHM) and the lowest resistivity. The filmdeposited at a sputtering power of 200 W has the highest growth rate, and the second best crystalline quality in view of FWHMand resistivity. The film deposited at a sputtering power of 50 W has the moderate growth rate, and the worst crystalline qualityin view of FWHM and resistivity. High-resolution TEM observations reveal that films deposited at sputtering powers of 10and 200 W have far fewer defects, such as grain boundaries, dislocations and stacking faults than those deposited at a sputteringpower of 50 W. Such deposition behavior could be explained by sputtering power, which affected the generation of the chargednanoparticles. And the high quality of films could be obtained at a high deposition rate, in which charge plays an important role.
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참고문헌 (30)
참고문헌 신청
Markov, I.V. / 2003 / Crystal Growth for Beginners / World Scientific
Xin Feng / 2020 / Non-classical crystal growth on a hydrophobic substrate: learning from bivalve nacre / CrystEngComm 22(18):3100~3105
Carlos Lizandara-Pueyo / 2014 / Li-doped ZnO nanorods with single-crystal quality – non-classical crystallization and self-assembly into mesoporous materials / CrystEngComm 16(8):1525~1531
Carlos Rodríguez-Navarro / 2016 / Nonclassical crystallization in vivo et in vitro (II): Nanogranular features in biomimetic minerals disclose a general colloid-mediated crystal growth mechanism / Journal of Structural Biology 196(2):260~287
Behnam Sadri / 2017 / Aggregation and deposition of colloidal particles: Effect of surface properties of collector beads / Colloids and Surfaces A: Physicochemical and Engineering Aspects 530:46~52
Xin Feng / 2020 / Non-classical crystal growth on a hydrophobic substrate: learning from bivalve nacre / CrystEngComm 22(18):3100~3105
Carlos Lizandara-Pueyo / 2014 / Li-doped ZnO nanorods with single-crystal quality – non-classical crystallization and self-assembly into mesoporous materials / CrystEngComm 16(8):1525~1531
Carlos Rodríguez-Navarro / 2016 / Nonclassical crystallization in vivo et in vitro (II): Nanogranular features in biomimetic minerals disclose a general colloid-mediated crystal growth mechanism / Journal of Structural Biology 196(2):260~287
Behnam Sadri / 2017 / Aggregation and deposition of colloidal particles: Effect of surface properties of collector beads / Colloids and Surfaces A: Physicochemical and Engineering Aspects 530:46~52
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